SMRTR Science & EngineeringApr 16, 2025TechSpot

Researchers use lasers and metalenses to align 3D chips with atomic precision

SMRTR summary

UMass Amherst researchers have developed a laser-based technique using concentric metalenses to align 3D semiconductor chips with unprecedented precision. The method can detect misalignments as small as 0.017 nanometers, potentially revolutionizing chip manufacturing and enabling more advanced, compact devices.

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